17.2叠层式驱动器Stack Actuators

叠层式压电驱动器采用多层压电陶瓷薄片按照一定极性方向组合而成，在直流电压控制下沿长度方向伸缩，具有位移分辨率高（可达到纳米级）、驱动力大、响应速度快等特点。可应用于纳米定位控制台、密光学显微镜、激光调谐、高速阀门等微位移驱动装置

Stack actuators utilize super thin piezo-ceramic wafers, bonded in a stack to provide high sensitivity, rapid response sensing and low driver voltage displacement and force actuation, both with outstanding cycle rates and superb reliability. They are used widely for the accurate displacement control of equipment, and are commonplace in optical, semiconductor, aviation, medical and genetic engineering fields.